Material：S.S.304

Surface treatment: electro-polishing

Specification：CF150、CF200 rectangle UHV chamber

Leak rate<2 x10^-10mbar.l/sec

Operation Pressure<7.5×10^-10torr

When the total pressure is below 1 x10^-9 torr, partial pressure of above 45amu is <0.1%.

RGA detection and analysis